Patent · US Expired

Organometallic compounds

US5149853A · kind A · utility

2Cited by

2References

10Claims

0Family size

Assignee

MERCK PATENT GESELLSCHAFT MIT BESHRANK TER HAFTUNG · DE

Inventors

Dietrich Erdmann · Mühltal, DE
Max E. Van Ghemen · Darmstadt, DE
Ludwig Pohl · Darmstadt, DE
Herbert Schumann · Berlin, DE
Uwe Hartmann · Berlin, DE
Wilfried Wassermann · Berlin, DE
Meino Heyen · Aachen, DE
Holger Jurgensen · Aachen, DE

Key dates

Filing date	Nov 8, 1991
Grant date	Sep 22, 1992
Priority date	—
Expiry date	Nov 8, 2011

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC30B29/40
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.