Capacitive pressure sensor
US5150275A · kind A · utility
39Cited by
3References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 1, 1991 |
| Grant date | Sep 22, 1992 |
| Priority date | — |
| Expiry date | Jul 1, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A capacitance pressure sensor includes a conductive diaphragm positioned between two pneumatically separate regions. The diaphragm is supported at its periphery by a concave base member. An electrode assembly establishes a substantially planar conductive surface opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a plurality of support legs extending through, and secured at, apertures in the base member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.