Patent · US Expired

Process for manufacturing an optical recording medium

US5151295A · kind A · utility

10Cited by
4References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 18, 1990
Grant dateSep 29, 1992
Priority date
Expiry dateOct 18, 2010

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG11B7/26
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A method of depositing the layers of an optical recording medium to their requisite thicknesses is disclosed in which optical monitoring of the reflectivity of a first dielectric layer during deposition is used to determine the deposition rate. The reflectivity is monitored to determine the time period in which the reflectivity reaches a maximum or minimum value, which occurs when the layer is a quarter wave thick. The deposition rate is derived from that time period, and the deposition is continued for a time in accordance with the deposition rate until the requisite thickness of the first dielectric layer is obtained. The second dielectric layer is deposited for a lesser time period in accordance with the deposition rate which has been optically derived during deposition of the first dielectric layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.