Method and apparatus for measuring a carrier lifetime of IV group semiconductor
US5153503A · kind A · utility
10Cited by
11References
18Claims
0Family size
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Key dates
| Filing date | Mar 26, 1991 |
| Grant date | Oct 6, 1992 |
| Priority date | — |
| Expiry date | Mar 26, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/6489
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring carrier lifetime of IV group semiconductors. The method includes the steps of irradiating pulse light, whose photon energy is larger than the bandgap of a IV group semiconductor and whose interval is sufficiently longer than the carrier lifetime of a IV group semiconductor, on a IV group semiconductor to be measured, exciting the IV group semiconductor, and generating excess carriers, obtaining a decay time of a band emission from a IV group semiconductor, and determining a carrier lifetime of the IV group semiconductor from the decay time of the band emission.
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