Optical inspection apparatus and illumination system particularly useful therein
US5153668A · kind A · utility
70Cited by
10References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 1991 |
| Grant date | Oct 6, 1992 |
| Priority date | — |
| Expiry date | May 7, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95638
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Optical inspection apparatus includes an illumination system illuminating an area of the workpiece surface with a sky of illumination which is, with respect to each point in the illuminated area, substantially circularly symmetric over a solid angle around the optical axis passing perpendicularly through the electro-optical sensor and the workpiece surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.