Active matrix-type liquid crystal display containing a horizontal MIM device with inter-digital conductors
US5153753A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 1990 |
| Grant date | Oct 6, 1992 |
| Priority date | — |
| Expiry date | Apr 10, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention is directed to an active matrix-type liquid crystal display using a horizontal MIM device as a non-linear resistance device. The layers of the metal-insulator-metal elements are formed in a horizontal direction and use a hard carbon film as the insulator layer of the horizontal MIM device. The hard carbon film comprises carbon and hydrogen and a constituent element such as a group III element, group IV element, group V element, alkali metal element, alkaline earth metal element, nitrogen atoms, oxygen atoms, chalcogen atoms or halogen atoms, and has typical specific resistivities of from 10.sup.4 to 10.sup.13 ohm.cm. The claimed devices are economical to produce and substantially free from short circuits caused by pinholes or voids in the insulator layer. In a preferred embodiment, the electrodes of the MIM device are inter-digital in shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.