Method and apparatus for measuring surface flatness
US5153844A · kind A · utility
16Cited by
9References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 1990 |
| Grant date | Oct 6, 1992 |
| Priority date | — |
| Expiry date | Jan 23, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to a method and apparatus for determining the flatness or planarity of a surface and, specifically, to a method and apparatus for determining the flatness or planarity of a surface using a computerized optics technique.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.