Rough vacuum pump using bulk getter material
US5154582A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 21, 1991 |
| Grant date | Oct 13, 1992 |
| Priority date | — |
| Expiry date | Aug 21, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J7/18
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down a vacuum chamber to a rough vacuum. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 2 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a desired vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.