Single-source metalloorganic precursors to produce II/VI materials

US5157136A · kind A · utility

Assignee

• The Regents of the University of California · US

Inventors

• John D. Arnold · Berkeley, US
• Phillip James Bonasia · Berkeley, US

Key dates

• Filing date: Apr 9, 1991
• Grant date: Oct 20, 1992
• Expiry date: Apr 9, 2011

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/0262
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

The present invention relates a precursor metal organic compound of the formula: EQU (R.sub.3 --Si).sub.3 --Y--Q--M--A (I) PA1 wherein M is selected from the Group IIb elements of zinc, cadmium, or mercury; PA1 A is selected from amide, alkyl having from 1 to 10 carbon atoms, aryl, substituted aryl, or --Q'--Y'--(Si--R'.sub.3).sub.3 L.sub.2 wherein L is selected from nothing or a Lewis base ligand, PA1 Q and Q' are each independently selected from Group VIa elements of sulfur, selenium, or tellurium; and PA1 Y and Y' are each independently selected from carbon, silicon, germanum and tin, and PA1 R and R' are each independently selected from alkyl having from 1 to 10 carbon atoms, aryl or substituted aryl. In a preferred embodiment, A is --Q'--Y'--(Si--R'.sub.3)L.sub.2 where L is nothing or a Lewis base ligand, especially wherein Q.dbd.Q', Y.dbd.Y' and R.dbd.R'. Methods of producing these compounds are also disclosed. These precursor materials provide in a single compound the binary, tertiary or quaternary metals in a ratio to each other that is controllable by judicious choise of metal atoms and organic substituents. The metal alloys are useful in a variety of electronic applicatio…