Method and apparatus for the electrolytic preparation of group IV and V hydrides
US5158656A · kind A · utility
11Cited by
8References
31Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 22, 1991 |
| Grant date | Oct 27, 1992 |
| Priority date | — |
| Expiry date | Mar 22, 2011 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25B1/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electrochemical apparatus and method for supplying volatile hydrides of sufficient purity, at the proper pressure, and in the required volume, for direct introduction into a chemical vapor deposition reactor in which semiconductors are manufactured and doped.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.