Method of fabricating an aperture plate for a roof-shooter type printhead
US5160577A · kind A · utility
134Cited by
5References
9Claims
0Family size
Inventor
Key dates
| Filing date | Jul 30, 1991 |
| Grant date | Nov 3, 1992 |
| Priority date | — |
| Expiry date | Jul 30, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/30608
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of fabricating an aperture plate for a roofshooter thermal ink jet printhead wherein a two step orientation dependent etch is conducted on a silicon wafer. The two step etch forms a trough in one face of the silicon wafer and a plurality of apertures in either the same or opposite face as the trough.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.