Arc-magnetron and the method of coating
US5160595A · kind A · utility
17Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 1991 |
| Grant date | Nov 3, 1992 |
| Priority date | — |
| Expiry date | May 16, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3455
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An arc magnetron is described in which an edge magnet arrangement is displaceable in the axial direction relative to a preferably fixedly mounted center pole permanent magnet so that a cathode sputtering process and/or an arc discharge process can be realized in dependence on the relative position of the edge magnet arrangement and the center pole magnet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.