Method of producing microstructered metallic bodies

US5162078A · kind A · utility

Assignee

• Kernforschungszentrum Karlsruhe GmbH · DE

Inventors

• Peter Bley · Blankenloch, DE
• Herbert Hein · Alzenau, DE
• Jurgen Mohr · Eppingen, DE
• Werner Schomburg · Remchingen, DE

Key dates

• Filing date: Jul 5, 1991
• Grant date: Nov 10, 1992
• Expiry date: Jul 5, 2011

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D1/003
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The invention relates to a method of producing microstructured metallic bodies in which plastic negative molds of the microstructures are produced on an electrically conductive base plate by means of electron beam lithography, X-ray lithography or a micromolding technique. Cavities of the negative molds are filled with metal by electroplating while employing the electrically conductive base plate as an electrode. In the course of producing the negative molds, a residual plastic layer is left at the bottom of the cavities of the negative molds on the electrically conductive base plate. Also, before the cavities of the negative molds are filled with metal by electroplating, the residual plastic layer at the bottom of the cavities is removed by means of reactive ion etching with ions that are accelerated perpendicularly toward the surface of the base plate.