Radiation sensitive devices
US5162193A · kind A · utility
3Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1990 |
| Grant date | Nov 10, 1992 |
| Priority date | — |
| Expiry date | Nov 19, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/162
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A radiation sensitive device is provided with a discontinuous covering layer to improve vacuum draw down. The covering layer is produced by forming a solution or dispersion of the layer-forming material in a liquid hydrocarbon. Drops of the solution or dispersion are then sprayed onto the radiation sensitive device to form the discontinuous covering layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.