Patent · US Expired

Semiconductor device and a method for producing the same

US5164218A · kind A · utility

19Cited by
5References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 17, 1991
Grant dateNov 17, 1992
Priority date
Expiry dateJul 17, 2011

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S148/012
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device of vertical arrangement includes an anode region formed of a first semiconductor substrate and a second semiconductor substrate joined with the first semiconductor substrate. The first semiconductor substrate forms a high-resistance layer with a predetermined impurity density, and the second semiconductor substrate forms a low-resistance layer whose impurity density is higher than that of the high-resistance layer. A PN junction is formed inside the first semiconductor substrate. The periphery of the first semiconductor substrate including the PN junction is configured in an inverted mesa structure and coated with an insulation material. With this arrangement, the semiconductor device has a high withstand voltage and enables an employment of a large diameter wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.