Charged particle extraction arrangement
US5164594A · kind A · utility
23Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 22, 1991 |
| Grant date | Nov 17, 1992 |
| Priority date | — |
| Expiry date | Oct 22, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24485
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An arrangement is described for extracting charged particles which have been emitted from a sample due to the impact of a primary ion beam. The arrangement comprises an electrode arrangement effective to produce an electric potential which is non-linear along a chosen direction of travel of the particles. A system of einzel lenses is effective to match the trajectories of the particles passing from the electrode means to the analyser of a mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.