Movement measuring interferometer and driving system
US5164792A · kind A · utility
1Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 1990 |
| Grant date | Nov 17, 1992 |
| Priority date | — |
| Expiry date | Jul 20, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49221
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A table carrier system of the present invention has a movable table for carrying an object. A displacement detecting system for detecting the displacement of the table by using an interference of light, and a table driving system positions the table according to the detected displacement. If a scaling amount is set in order to change a predetermined displacement range of the table, a reference value of wavelength set in the detecting system is changed in compliance with the scaling amount.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.