Thin film transistor array and method of manufacturing same
US5166086A · kind A · utility
32Cited by
12References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1992 |
| Grant date | Nov 24, 1992 |
| Priority date | — |
| Expiry date | Feb 12, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6746
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A self-aligned TFT array for liquid crystal display devices and a method of manufacturing the array are disclosed. A protective insulating layer on a semiconductor layer is exactly aligned with a gate electrode. A self-alignment method is used for patterning the protective insulating layer and an impurity-doped semiconductor layer on the semiconductor layer. No lift-off process is necessary.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.