Patent · US Expired

Magnetic bearings for a high speed rotary vacuum pump

US5166566A · kind A · utility

24Cited by
9References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 1, 1989
Grant dateNov 24, 1992
Priority date
Expiry dateJun 1, 2009

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF16C2360/45
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

The invention describes a system of magnetic bearings for high speed rotary vacuum pumps, having two radially centering passive magnetic bearings, which originate axially destabilizing forces and thus an unstable point. The axial position is regulated by an electrical solenoid and the operational point of the radial bearing is axially shifted with reference to the unstable point in direction of a high vacuum flange. One of two emergency bearings is located on a high vacuum end and the other is arranged on a fore-vacuum end between the solenoid and the lower passive radial bearing, the rotor, solenoid and position sensor being arranged so as to insure an easy adjustability of the rotor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.