Integrated tunable resonators for use in oscillators and filters
US5166646A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 7, 1992 |
| Grant date | Nov 24, 1992 |
| Priority date | — |
| Expiry date | Feb 7, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02204
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An integrated tunable resonator (100) includes a common semiconductor carrier (110). Formed on the common semiconductor carrier (110) is an integrated voltage variable capacitor (104). A bulk acoustic wave resonator is formed on the common semiconductor carrier (110) and coupled to the voltage variable capacitor (104). In one aspect of the present invention, a thin film resonator (106) is coupled to the voltage variable capacitor (104) both of which are formed on a common semiconductor substrate (110). The combination of these three elements provide for a tunable integrated resonator (100). In another aspect of the present invention, a surface acoustic wave resonator (522), formed on a common semiconductor carrier (514), is coupled to a voltage variable capacitor (520) in order to provide a tunable resonator (500).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.