Deionized water purification system
US5167808A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 1990 |
| Grant date | Dec 1, 1992 |
| Priority date | — |
| Expiry date | Aug 16, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F2103/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A DI water purification system for the point-of-use purification of water in applications demanding the highest quality of water. The system includes the following components: 1. dual submicron filters of 0.2 micron rating in parallel, housed in chemically inert housings; 2. a stacked-membrane or spiral-wound Ultrafilter module of nominal rating of 5000 to 100,000 molecular weight; 3. purge flowmeters appropriate to the purge requirements of the Ultrafilter; 4. chemically inert piping, gasket and sealing materials used to join the various sections of the system; and, 5. chemically resistant supports and housings to mechanically fasten the various components together. The DI water purification system is suitable for use in industries such as semiconductor, medical, pharmaceutical, chemical or any other application or use requiring ultrafiltered DI water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.