Miniature microwave and millimeter wave tunable circuit
US5168249A · kind A · utility
31Cited by
6References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 7, 1991 |
| Grant date | Dec 1, 1992 |
| Priority date | — |
| Expiry date | Jun 7, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/004
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A miniature, electrostatically actuated, dynamically tunable circuit which is operable to tune a transmission line in response to control signals. This circuit is micromachined with the use of integrated circuit processes such that a fixed transmission line is fabricated on a substrate and a movable signal line is fabricated over the substrate and is movable relative to the fixed transmission line in response to electrostatic fields produced when the control signals are selectively applied to an array of air bridge stator control electrodes which span the transmission line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.