Clean room arrangement
US5169418A · kind A · utility
16Cited by
9References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 1991 |
| Grant date | Dec 8, 1992 |
| Priority date | — |
| Expiry date | Sep 26, 2011 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F3/167
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A clean room arrangement comprises a clean room having an upper portion and a lower portion. Clean air is introduced into the upper portion of the clean room, flows downward and expelled from the lower portion of the clean room. An air recirculation passage is connected to the clean room such that the lower portion of the clean room is communicated with the upper portion of the clean room. A heat source is provided in the air recirculation passage to generate an ascending flow of air in the air recirculation passage so that the air descends in the clean room due to natural convection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.