Apparatus for the synthesis of diamond-like thin films
US5169452A · kind A · utility
9Cited by
5References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 16, 1992 |
| Grant date | Dec 8, 1992 |
| Priority date | — |
| Expiry date | Mar 16, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/545
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Diamond-like thin films having high uniformity and high crystallinity are produced by introducing a hydrocarbon material gas into a chamber, ionizing the gas, and depositing the ionized gas on a substrate. The gas is ionized by thermionic emission from two or more files of hot cathodes, each file having a plurality of filaments arranged at substantially uniform intervals in a linear or zigzag line configuration. Each file of hot cathodes is surrounded separately by an anode at a substantially uniform distance from a respective file of the filaments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.