Apparatus and a method for alignment verification having an opaque work piece between two artwork masters
US5170058A · kind A · utility
13Cited by
9References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1991 |
| Grant date | Dec 8, 1992 |
| Priority date | — |
| Expiry date | Oct 30, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates generally to a new apparatus and a method for alignment verification. More particularly, the invention encompasses an apparatus that allows the imaging on a structure from opposite sides while the imaging masks are on the opposite sides of the structure, and the masks and the structure are all aligned with each other. This apparatus also discloses means that can verify that the two imaging masks that are on the opposite sides of each other are aligned with each other during imaging processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.