Accelerometric sensor with flectional vibratory beams
US5170665A · kind A · utility
10Cited by
5References
11Claims
0Family size
Inventors
Key dates
| Filing date | Aug 1, 1990 |
| Grant date | Dec 15, 1992 |
| Priority date | — |
| Expiry date | Aug 1, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S73/01
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The accelerometric sensor is of the type comprising a fixed mass, a mobile mass and two flectional vibrating beams each having ends that are linked to the masses. According to the invention, the masses and the beams consist of one single piece machined in a same plate of material of uniform thickness, e.g. in a piezoelectric material such as quartz. The single piece preferably comprises two second beams each having ends that are integral with the masses and placed on both sides of the vibratory beams. The flexural stiffness of the second beams is higher than that of the vibrating beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.