Two-valve thin plate micropump
US5171132A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1990 |
| Grant date | Dec 15, 1992 |
| Priority date | — |
| Expiry date | Dec 21, 2010 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2400/0481
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A micropump particularly suited for use in the fields of medicine and analysis includes a thin membrane plate sandwiched between a surface plate and a glass-made substrate. The intermediate membrane has an inlet valve and an outlet valve and the glass substrate has an inlet port and an outlet port, respectively connected to the corresponding valves. Between the valves formed in the thin membrane plate by means of etching, there is a diaphragm on which there is a piezoelectric element for detecting behavior of the diaphragm. Another micropump has an upper thin membrane plate member and a lower member. The upper member has the inlet valve and the lower member has the outlet valve. An intermediate glass substrate is inserted between the upper and the lower thin membrane plate member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.