Laser processing device and laser processing method
US5171963A · kind A · utility
18Cited by
6References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 1991 |
| Grant date | Dec 15, 1992 |
| Priority date | — |
| Expiry date | May 16, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/50064
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser processing device includes a Z stage movable in the up and down directions with respect to a XY stage movable in the X, Y directions on which an object to be processed is provided. The surface of the object to be processed is image-sensed by a CCD camera through a lens of an electrically-driven revolver attached to the Z stage, which is projected in a monitor. When a defect of the object is displayed in the monitor, a laser beam is radiated to a defective portion of the object from a laser head provided in the Z stage and the defective portion is removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.