Patent · US Expired

Glow discharge atomic emission spectroscopy and apparatus thereof

US5172183A · kind A · utility

3Cited by
0References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 1991
Grant dateDec 15, 1992
Priority date
Expiry dateMar 18, 2011

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/67
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An improved glow discharge atomic emission spectroscopy method and apparatus is offered in which the introduction of a rare gas into a glow discharge tube is temporarily cut off and after the inside of the glow discharge tube is maintained at a higher degree of vacuum, a preliminary discharge is executed to remove adsorbed or extraneous substances on the specimen surface, and then the analysis of the specimen surface is performed. The method and the apparatus described in the above are suitable for quick and simple analysis of the uppermost surface layer of a solid specimen in the direction of depth.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.