Water soluble contrast enhancement composition and method of use
US5173390A · kind A · utility
0Cited by
5References
9Claims
0Family size
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Key dates
| Filing date | Sep 13, 1990 |
| Grant date | Dec 22, 1992 |
| Priority date | — |
| Expiry date | Sep 13, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A water soluble contrast enhancement compound and composition, and a method of use thereof, are disclosed for improving sidewall profiles in photoresist patterning and developing. The compound consists of a 1-oxy-2-diazonaphthalene sulfonamide salt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.