Patent · US Expired

Semiconductor substrate manufacturing by recrystallization using a cooling medium

US5173446A · kind A · utility

43Cited by
11References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 13, 1991
Grant dateDec 22, 1992
Priority date
Expiry dateJun 13, 2011

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S117/905
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor substrate comprises a foundation, a semiconductor monocrystalline film formed on the foundation, and a high-melting-point metal film or a high-melting-point metal alloy film disposed in at least part of a region between the semiconductor monocrystalline film and the foundation. The high-melting-point metal film disposed below the semiconductor monocrystalline film can be utilized as a conductor in a semiconductor device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.