Patent · US Expired

Apparatus for the production of a regular microwave field

US5173640A · kind A · utility

11Cited by

14References

22Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Michael Geisler · Apolda, DE
Michael Jung · Frankfurt am Main, DE
Bernhard Kessler · Burkardroth, DE

Key dates

Filing date	Nov 15, 1991
Grant date	Dec 22, 1992
Priority date	—
Expiry date	Nov 15, 2011

Classification

Technology area (CPC H)Electricity
CPC primaryH01P5/08
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention relates to an apparatus for the production of a regular microwave field over a comparatively great area. This apparatus has a cavity resonator into which microwaves are put. Electromagnetic energy is coupled by special couplers, inductively or capacitively, out of the standing waves forming in the cavity resonator into a chamber in which preferably a plasma is contained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.