Device manipulation apparatus and method
US5174021A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 1991 |
| Grant date | Dec 29, 1992 |
| Priority date | — |
| Expiry date | May 31, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/11
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A first flat surface portion (17) of an upper mounting member (11) is made to be parallel with a second flat surface portion (18) of a lower mounting member (12) by, first, supporting the lower mounting member on a spherical cushion of air defined by a lower surface portion (20). The first surface portion (17) is next brought into contact with the second surface portion (18) which causes an adjustment in the position of lower mounting member (12) so as to make the surfaces (17) and (18) coplanar. The air supply to the lower mounting member is then reversed to apply a vacuum which draws the lower mounting member (12) into contact with the support member (22) so as to fix the second surface portion (18) in a parallel relationship to that of the first surface portion (17).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.