Pressure transducer with reduced offset signal
US5174156A · kind A · utility
13Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 1990 |
| Grant date | Dec 29, 1992 |
| Priority date | — |
| Expiry date | Jul 27, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A structure and method of making a piezoresistive transducer with reduced offset current. The transducer is comprised of a piezoresistive die having a support rim and a diaphragm, and a support housing having a wall and an aperture. The shape of the diaphragm is matched with the shape of the aperture while the shape of the support rim is matched with the shape of the wall. By matching these shapes, temperature induced stresses are reduced, thus reducing temperature induced offset currents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.