Impurity diffusing furnace
US5174745A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 3, 1992 |
| Grant date | Dec 29, 1992 |
| Priority date | — |
| Expiry date | Feb 3, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/18
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An impurity furnace is disclosed, which includes: an atmoscan tube 1, a gas inlet 20, a processor tube 2, a door flange 60 and a discharge tube 70. A pressure gage 80 is installed at a side of the door flange 60, for measuring the internal pressure of the atmoscan tube 1 and transmitting the measured value thereof in the form of electrical signals. A microcomputer 3 connected to pressure gage compares the measured value of the pressure gage with a preset reference value, and generates control signals in order to control the opening degree of a butterfly valve 90. The butterfly valve is connected to the microcomputer 3, the opening degree thereof being controlled by the value controlling the signals from the microcomputer 3. The discharge tube extends from the interior of the atmoscan tube to the butterfly valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.