Transmission line for providing power to an electrode boat in a plasma enhanced chemical vapor deposition system
US5175021A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 1990 |
| Grant date | Dec 29, 1992 |
| Priority date | — |
| Expiry date | Dec 12, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S411/904
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A transmission line is constructed from ceramic and nickel materials to provide a characteristic impedance that matches the characteristic impedance of a boat assembly in a chemical vapor deposition system. The transmission line is interposed between a set of feedthroughs through the wall of a reactant tube and a set of contacts on the boat assembly. The transmission line improves the efficiency of the power transfer to the boat assembly from an RF power source external to the reactant tube. The transmission line is particularly advantageous at high frequencies such as, for example, 13.56 MHz. This improves the repeatability of the deposition of film on wafers in the boat assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.