One dimensional X-ray image sensor with a correction filter and X-ray inspecting apparatus using the same
US5177776A · kind A · utility
22Cited by
10References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1991 |
| Grant date | Jan 5, 1993 |
| Priority date | — |
| Expiry date | Mar 22, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A one dimensional X-ray image sensor consists of a plurality of unit detecting devices aligned in a row and a filter which covers a portion thereof and is made of a material having an X-ray absorption coefficient equal to or nearly equal to that of a target material to be inspected. An X-ray inspection apparatus includes the one dimensional X-ray image sensor and further includes a data processor for correcting measured values using data measured in regard to the filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.