Method and apparatus for producing nitride products
US5178844A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 1990 |
| Grant date | Jan 12, 1993 |
| Priority date | — |
| Expiry date | Apr 3, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/64
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method and apparatus are provided for producing a product comprising a nitride compound, such as for example silicon nitride. A reactor is provided which has a chamber defined therein which is divided into a combustion zone and a reaction zone. A combustible mixture is injected into the combustion zone in a direction generally toward the reaction zone, and is accordingly combusted in the combustion zone. At least one reactant is injected at the boundary between the zones into the reactor chamber in a direction generally parallel to the longitudinal axis of the chamber so as to react to from raw product comprising the nitride compound. According to another aspect, a raw product powder as produced by the reactor comprises silicon nitride as the nitride compound and further comprises elemental silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.