Multi-dimensional precision micro-actuator
US5179499A · kind A · utility
80Cited by
11References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 1992 |
| Grant date | Jan 12, 1993 |
| Priority date | — |
| Expiry date | Apr 14, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0078
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.