Electronic microvalve apparatus and fabrication
US5180623A · kind A · utility
104Cited by
7References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 2, 1991 |
| Grant date | Jan 19, 1993 |
| Priority date | — |
| Expiry date | Jan 2, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.