Liquid crystal device and method for producing the same with metal spacer in hole of thin film device's insulator
US5181132A · kind A · utility
44Cited by
6References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 1991 |
| Grant date | Jan 19, 1993 |
| Priority date | — |
| Expiry date | May 31, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133512
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This invention is to improve the assembling precision of an electronic device including a functional member, other than an electrode, requiring alignment, such as a light shield member or a spacer. Such functional member is composed of aluminum or a metal principally composed of aluminum, deposited by a CVD process utilizing alkylaluminum hydride gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.