Process for manufacturing diamond-like thin film
US5185067A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1990 |
| Grant date | Feb 9, 1993 |
| Priority date | — |
| Expiry date | Jun 29, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A diamond-like thin film formed on a substrate, with the peripheral region tapered toward the edge, satisfying the dimensional relation EQU 100<b/a<10,000 where a is the thickness of the film portion where the slope starts and b is the length of the slope. An apparatus for producing the film comprises a source for feeding a low-molecular-weight hydrocarbon or a feed gas capable of affording a low-molecular-weight hydrocarbon upon decompositon or reaction, means for ionizing the gas, a substrate held opposite to the ionizing means, and a mask member located between the ionizing means and the substrate. The apparatus and process using the apparatus are characterized in that the distance between the mask member and the substrate is fixed so as to obtain a diamond-like thin film satisfying the above-mentioned dimensional relation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.