Microwave film bulk acoustic resonator and manifolded filter bank
US5185589A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 1991 |
| Grant date | Feb 9, 1993 |
| Priority date | — |
| Expiry date | May 17, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/588
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A film bulk acoustic resonator (FBAR) configured as a coplanar transmission line structure. A film resonator formed over an opening in a substrate is connected to associated circuitry by one or more transmission lines formed on the substrate. The coplanar ground plane of this structure provides a simple mechanism for providing a true ground connection to the resonator without the need for vias passing through the substrate. The transmission line connection eliminates the need for wirebonds, thus simplifying fabrication, allowing the device to be more easily modified for computer simulation, and facilitating the operation of the device at microwave frequencies. Embodiments for standard, stacked, and 3-port FBAR's as well as a filter bank consisting of a plurality of coplanar 3-port FBAR's, are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.