Exposure apparatus for forming pattern on printed-wiring board
US5185625A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 18, 1992 |
| Grant date | Feb 9, 1993 |
| Priority date | — |
| Expiry date | Feb 18, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/1572
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An exposure apparatus having upper and lower ultraviolet rays irradiating devices which are vertically symmetrically disposed above and below a pattern-forming board having through holes therein, and upper and lower light-transmissible plates which are disposed spacedly from each other in a light path of the ultraviolet rays irradiated to the board so as to be vertically symmetrically disposed with respect to the board and horizontally movable, each of the ultraviolet rays irradiating devices having an electric discharge lamp and a reflection mirror and each of the light-transmissible plates having an uneven surface of a sawtooth section. With this arrangement, a proper photochemical reaction can be induced to the photoresist on the surface of the board and the inner wall surfaces of the through holes to thereby improve a working efficiency of a pattern forming process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.