Capacitive pressure sensor
US5186054A · kind A · utility
72Cited by
4References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 29, 1990 |
| Grant date | Feb 16, 1993 |
| Priority date | — |
| Expiry date | Nov 29, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure sensor includes a set of facing electrodes arranged with a cavity disposed therebetween and having insulation layers respectively formed on the surfaces thereof. The contact area between the facing electrodes varies directly with the applied pressure, and variation in the contact area causes variation in the capacitance which is detected as a pressure measurement. Since the capacitance variation is proportional to the applied pressure, a pressure signal which is substantially linear can be obtained. Therefore, the capacitive pressure sensor of this invention can measure pressure with high precision.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.