Patent · US Expired

Process for fabricating an integrated circuit using local silicide interconnection lines

US5187122A · kind A · utility

99Cited by
3References
12Claims
0Family size

Assignee

Inventor

Key dates

Filing dateFeb 26, 1991
Grant dateFeb 16, 1993
Priority date
Expiry dateFeb 26, 2011

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S148/019
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A process for fabricating a semiconductor device using local silicide interconnection lines make it possible to fabricate an integrated circuit having a plurality of electronic elements disposed on a semi-conductor substrate. The electronic elements are formed on the substrate such that they are grouped into a first region and a second region adjacent to the first region, each of these regions having predetermined conductivities. The first region has a layer of dielectric material disposed upon it with at least one capacitive element disposed on the dielectric layer. The capacitive element includes a first electrode layer and a second electrode layer. The second region has at least one double junction metal-insulator semi-conductor field effect transistor (MISFET) located therein. The MISFET includes at least three regions, a gate region and two active regions, a source region and a drain region. In accordance with the teachings of the present invention, a process is provided whereby one of said two active regions is electrically connected by a first local connection line to the first electrode layer of the capacitive element, a bond pad is disposed on the gate region, a source bon…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.