Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe
US5187367A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 8, 1991 |
| Grant date | Feb 16, 1993 |
| Priority date | — |
| Expiry date | Aug 8, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/947
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever type probe comprises a cantilever-shaped displacement element having electrodes for driving which displace two layers of piezoelectric material at the interface and first and second surfaces of the layers, respectively, and each of the electrodes being arranged separately within the same plane, and a tip for information input and output connected to electrodes for drawing out arranged separately from the electrodes for driving at the free end of either one of the first and second surfaces of the element. A scanning tunneling microscopy or an information processing device comprises the cantilever type probe, a driver for driving the displacement element of the cantilever type probe and a bias or pulse voltage applicator for applying a bias or pulse voltage between a sample and the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.