Method and apparatus for charge distribution analysis
US5187442A · kind A · utility
Inventors
Key dates
| Filing date | Sep 30, 1991 |
| Grant date | Feb 16, 1993 |
| Priority date | — |
| Expiry date | Sep 30, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R29/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Method and apparatus of charge distribution analysis insulating and semiconducting dielectric materials to measure by using a Coulomb Balance surface/subsurface space charge layers and the sign, mobility and polarizability of charge carriers. The technique includes measuring the force, attractive or repellent, between a bias electrode to which a voltage is applied and a dielectric material in a condensor half cell arrangement. An apparatus is provided for heating a sample for causing the generation of surface/subsurface charges, and then for applying an external potential while the sample is maintained at a high temperature. The effective mass of the sample is detected by determining the amount of force necessary to restore a balance arm, by which the sample is supported, to its original position, the alteration in position being due to attractive or repulsive electrostatic forces between the sample and the electrodes. The effective mass reflects the amount of peroxies or impurities within the sample, and the method and apparatus may be used for scientific mineral composition analysis, quality control of the purity of semiconductors, and in other applications. The heating of the sa…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.