Pressure sensor
US5189916A · kind A · utility
25Cited by
1References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1991 |
| Grant date | Mar 2, 1993 |
| Priority date | — |
| Expiry date | Aug 12, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor having a ceramic substrate formed from a first unsintered ceramic material, and a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material. The diaphragm is fixed to the periphery of a surface of the ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.