Apparatus and method for method for spatially- and spectrally-resolved measurements
US5192980A · kind A · utility
232Cited by
1References
8Claims
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Key dates
| Filing date | Jun 26, 1991 |
| Grant date | Mar 9, 1993 |
| Priority date | — |
| Expiry date | Jun 26, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/6489
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning optical microscope or mapping system for spectrally-resolved measurement of light reflected, emitted or scatttered from a specimen is disclosed, in which the spectrally-resolving element is integrated into the detection arm of the microscope or mapping system to result in good photon collection efficiency as well as good spectral and spatial resolution. A confocal version of the microscope is disclosed which will be of particular interest in fluorescence microscopy, and the non-confocal mapping system will be of particular interest in photoluminescence mapping of semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.